Tilkioglu, Bilge T.; Bolat, Sami; Tanrikulu, Mahmud Yusuf; Okyay, Ali Kemal
(JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A / A V S AMER INST PHYSICS, 2017-03)
The authors demonstrate the digital alloying of ZnO and TiO2 via atomic layer deposition method to be utilized as the active material of uncooled microbolometers. Depositions are carried out at 200 degrees C. Crystallinity ...